| 12233441 |
Ultraviolet and ozone cleaning apparatus and method of using |
Banqiu Wu, Eliyahu Shlomo DAGAN |
2025-02-25 |
| 12159782 |
Ultraviolet and ozone clean system |
Banqiu Wu, Hiroki Ogawa, Eliyahu Shlomo DAGAN |
2024-12-03 |
| 12128456 |
Megasonic clean with cavity property monitoring |
Banqiu Wu, Eliyahu Shlomo DAGAN |
2024-10-29 |
| 12085849 |
Baking chamber with shroud for mask clean |
Banqiu Wu, Eliyahu Shlomo DAGAN |
2024-09-10 |
| 11921422 |
Single-volume baking chamber for mask clean |
Banqiu Wu, Eliyahu Shlomo DAGAN |
2024-03-05 |
| 11803118 |
Methods and apparatus for photomask processing |
Banqiu Wu, Eliyahu Shlomo DAGAN |
2023-10-31 |
| 11798799 |
Ultraviolet and ozone clean system |
Banqiu Wu, Hiroki Ogawa, Eliyahu Shlomo DAGAN |
2023-10-24 |
| 11654460 |
Megasonic clean with cavity property monitoring |
Banqiu Wu, Eliyahu Shlomo DAGAN |
2023-05-23 |
| 11644748 |
Multi-volume baking chamber for mask clean |
Banqiu Wu, Eliyahu Shlomo DAGAN |
2023-05-09 |
| 11114350 |
Method for removing photoresist from photomask substrate |
Banqiu Wu, Eli DAGAN |
2021-09-07 |
| 10962889 |
Method and apparatus for high throughput photomask curing |
Banqiu Wu, Eli DAGAN, Bruce J. Fender |
2021-03-30 |
| 10928724 |
Attachment feature removal from photomask in extreme ultraviolet lithography application |
Banqiu Wu, Eli DAGAN, Bruce J. Fender |
2021-02-23 |
| 7297286 |
Methods for resist stripping and other processes for cleaning surfaces substantially free of contaminants |
Adel George Tannous |
2007-11-20 |
| 7101260 |
Methods for resist stripping and other processes for cleaning surfaces substantially free of contaminants |
Adel George Tannous |
2006-09-05 |
| 7066789 |
Methods for resist stripping and other processes for cleaning surfaces substantially free of contaminants |
Adel George Tannous |
2006-06-27 |
| 7040961 |
Methods for resist stripping and cleaning surfaces substantially free of contaminants |
Mohamed Boumerzoug, Adel George Tannous |
2006-05-09 |
| 6945853 |
Methods for cleaning utilizing multi-stage filtered carbon dioxide |
Goodarz Ahmadi, Paul Lewis, Adel George Tannous |
2005-09-20 |
| 6764385 |
Methods for resist stripping and cleaning surfaces substantially free of contaminants |
Mohamed Boumerzoug, Adel George Tannous |
2004-07-20 |
| 6719613 |
Methods for cleaning surfaces substantially free of contaminants utilizing filtered carbon dioxide |
Goodarz Ahmadi, Paul Lewis, Adel George Tannous, Keith H. Compton |
2004-04-13 |
| 6543462 |
Apparatus for cleaning surfaces substantially free of contaminants |
Paul Lewis, Goodarz Ahmadi, Adel George Tannous, Keith H. Compton |
2003-04-08 |
| 6530823 |
Methods for cleaning surfaces substantially free of contaminants |
Goodarz Ahmadi, Paul Lewis, Adel George Tannous, Keith H. Compton |
2003-03-11 |
| 6427096 |
Processing tool interface apparatus for use in manufacturing environment |
Paul Lewis, Adel George Tannous, Karl A. Davlin |
2002-07-30 |
| 6249990 |
Method and apparatus for transporting articles |
Adel George Tannous, Jeffrey D. Miller |
2001-06-26 |
