| 6677565 |
High speed autofocus and tilt for an optical imaging system |
Michael H. Wahl, Phillip Roberts |
2004-01-13 |
| 6314212 |
High precision optical metrology using frequency domain interpolation |
Daniel Lee Abraham |
2001-11-06 |
| 6184993 |
Apparatus for measuring a small gap using a Savart plate |
Carlos Alberto Duran |
2001-02-06 |
| 5875029 |
Apparatus and method for surface inspection by specular interferometric and diffuse light detection |
Peter C. Jann, Wayne Li, Igor Iosilevsky, Vlastimil Cejna, George A. Burt, Jr. |
1999-02-23 |
| 5818592 |
Non-contact optical glide tester |
L. Allan Butler, Michael H. Wahl |
1998-10-06 |
| 5808736 |
Thin film flying height calibration disk for calibrating flying height testers |
Carlos Alberto Duran, Christopher A. Lacey |
1998-09-15 |
| 5793480 |
Combined interferometer/ellipsometer for measuring small spacings |
Christopher A. Lacey, Carlos Alberto Duran, Ed Ross, Semyon Nodelman |
1998-08-11 |
| 5781299 |
Determining the complex refractive index phase offset in interferometric flying height testing |
L. Allan Butler |
1998-07-14 |
| 5777740 |
Combined interferometer/polarimeter |
Christopher A. Lacey |
1998-07-07 |
| 5696585 |
Apparatus and method for efficient electrostatic discharge on glass disks in flying height testers |
Michael H. Wahl |
1997-12-09 |
| 5638178 |
Imaging polarimeter detector for measurement of small spacings |
Christopher A. Lacey |
1997-06-10 |
| 5085502 |
Method and apparatus for digital morie profilometry calibrated for accurate conversion of phase information into distance measurements in a plurality of directions |
Brian J. Kwarta, David H. Outterson, James R. Reda |
1992-02-04 |
| 4963984 |
Optical projection camera alignment system and method |
— |
1990-10-16 |
