Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10249476 | Control of impedance of RF return path | Alexei Marakhtanov, Rajinder Dhindsa, Luc Albarede | 2019-04-02 |
| 10157730 | Control of impedance of RF delivery path | Alexei Marakhtanov, Rajinder Dhindsa, Luc Albarede | 2018-12-18 |
| 9401264 | Control of impedance of RF delivery path | Alexei Marakhtanov, Rajinder Dhindsa, Luc Albarede | 2016-07-26 |
| 9337000 | Control of impedance of RF return path | Alexei Marakhtanov, Rajinder Dhindsa, Luc Albarede | 2016-05-10 |
| 8872525 | System, method and apparatus for detecting DC bias in a plasma processing chamber | Alexei Marakhtanov, Rajinder Dhindsa | 2014-10-28 |