Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6217786 | Mechanism for bow reduction and critical dimension control in etching silicon dioxide using hydrogen-containing additive gases in fluorocarbon gas chemistry | Graham W. Hills, Thomas D. Nguyen, Douglas Keil | 2001-04-17 |
| 6117786 | Method for etching silicon dioxide using fluorocarbon gas chemistry | Thomas D. Nguyen, George Mueller | 2000-09-12 |