| 11107596 |
Flange flush tool |
Mark R. Heinold, Gary A. Runkle, Adam Holifield, Mark Allison |
2021-08-31 |
| 10060668 |
Temperature-controlled enclosures and temperature control system using the same |
Michael F. Conroy, Edward Lowerre, James Pelrin |
2018-08-28 |
| 9767932 |
Systems and methods of remote control rod drive decoupling |
Gary A. Runkle, Eli J. Tyson, Harold R. Setliff, Steven L. Suek, Martin Swan |
2017-09-19 |
| 8408020 |
Temperature-controlled enclosures and temperature control system using the same |
Michael F. Conroy, Edward Lowerre, James Pelrin |
2013-04-02 |
| 7629533 |
Temperature-controlled enclosures and temperature control system using the same |
Michael F. Conroy, Edward Lowerre, James Pelrin |
2009-12-08 |
| 6969830 |
Wafer chuck having thermal plate with interleaved heating and cooling elements |
William Stone, Douglas S. Olsen |
2005-11-29 |
| 6802368 |
Temperature control system for a workpiece chuck |
Paul Getchel, Henry A. Lyden |
2004-10-12 |
| 6700099 |
Wafer chuck having thermal plate with interleaved heating and cooling elements, interchangeable top surface assemblies and hard coated layer surfaces |
William Stone, Douglas S. Olsen |
2004-03-02 |
| 6540014 |
Workpiece chuck |
Paul Getchel, Henry A. Lyden |
2003-04-01 |
| 6415858 |
Temperature control system for a workpiece chuck |
Paul Getchel, Henry A. Lyden |
2002-07-09 |
| 6375176 |
Workpiece chuck with guard layer having vacuum distribution pattern |
Paul Getchel, Henry A. Lyden, William Stone, Robert Lopez, Thomas Schey +1 more |
2002-04-23 |
| 6073681 |
Workpiece chuck |
Paul Getchel, Henry A. Lyden |
2000-06-13 |
| 6019164 |
Workpiece chuck |
Paul Getchel, Henry A. Lyden, William Stone, Robert Lopez, Thomas Schey +1 more |
2000-02-01 |