| 6802368 |
Temperature control system for a workpiece chuck |
Paul Getchel, Kenneth M. Cole, Sr. |
2004-10-12 |
| 6540014 |
Workpiece chuck |
Paul Getchel, Kenneth M. Cole, Sr. |
2003-04-01 |
| 6415858 |
Temperature control system for a workpiece chuck |
Paul Getchel, Kenneth M. Cole, Sr. |
2002-07-09 |
| 6375176 |
Workpiece chuck with guard layer having vacuum distribution pattern |
Paul Getchel, Kenneth M. Cole, Sr., William Stone, Robert Lopez, Thomas Schey +1 more |
2002-04-23 |
| 6091060 |
Power and control system for a workpiece chuck |
Paul Getchel, Donald C. Miffitt |
2000-07-18 |
| 6073681 |
Workpiece chuck |
Paul Getchel, Kenneth M. Cole, Sr. |
2000-06-13 |
| 6033107 |
Temperature mapping system |
Dino J. Farina |
2000-03-07 |
| 6019164 |
Workpiece chuck |
Paul Getchel, Kenneth M. Cole, Sr., William Stone, Robert Lopez, Thomas Schey +1 more |
2000-02-01 |