Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6641705 | Apparatus and method for reducing differential sputter rates | Michael William Phaneuf, Jian Li, Richard F. Shuman, J. David Casey, Jr. | 2003-11-04 |
| 6322672 | Method and apparatus for milling copper interconnects in a charged particle beam system | Richard F. Shuman, J. David Casey, Jr. | 2001-11-27 |