Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10714373 | Electrostatic chuck and wafer processing apparatus | Yuichi Yoshii, Takuma Wada | 2020-07-14 |
| 10373853 | Electrostatic chuck and wafer processing apparatus | Yuichi Yoshii | 2019-08-06 |
| 9960067 | Electrostatic chuck | Yuichi Yoshii | 2018-05-01 |
| 9905449 | Electrostatic chuck | Kosuke Yamaguchi, Tatsuya Koga, Hiroki Matsui | 2018-02-27 |
| 9627240 | Electrostatic chuck | Kosuke Yamaguchi, Tatsuya Koga, Hiroki Matsui | 2017-04-18 |
| 9300229 | Electrostatic chuck | Takuma Wada | 2016-03-29 |
| 9252041 | Electrostatic chuck | Takuma Wada | 2016-02-02 |
| 9252040 | Electrostatic chuck | Takuma Wada | 2016-02-02 |
| 9093488 | AC-driven electrostatic chuck | Kaduko Ishikawa, Yuichi Yoshii, Junji Yonezawa | 2015-07-28 |
| 9042078 | Electrostatic chuck | Takuma Wada | 2015-05-26 |
| 8848335 | Electrostatic chuck | Hiroaki Hori, Ikuo Itakura | 2014-09-30 |