Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9093488 | AC-driven electrostatic chuck | Kazuki Anada, Yuichi Yoshii, Junji Yonezawa | 2015-07-28 |
| 9030798 | Electrostatic chuck | Junji Yonezawa, Toshihiro Aoshima, Yoshihide Hayashida | 2015-05-12 |
| 8971010 | Electrostatic chuck and method of manufacturing electrostatic chuck | Junji Yonezawa, Toshihiro Aoshima | 2015-03-03 |