Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6616816 | Substrate processing device and method | — | 2003-09-09 |
| 6610180 | Substrate processing device and method | Nobuyuki Takahashi | 2003-08-26 |
| 6486076 | Thin film deposition apparatus | — | 2002-11-26 |
| 6197118 | Thin film deposition apparatus | — | 2001-03-06 |
| 5897923 | Plasma treatment device | Takahiro Tamura | 1999-04-27 |
| 5441012 | Thin film deposition method for wafer | Ken-ichi Aketagawa, Toru Tatsumi | 1995-08-15 |
| 5284521 | Vacuum film forming apparatus | Ken-ichi Aketagawa, Shun Murakami, Hiroyoshi Murota, Toru Tatsumi | 1994-02-08 |
| 5234862 | Thin film deposition method | Ken-ichi Aketagawa, Toru Tatsumi, Shun Murakami, Hiroyoshi Murota | 1993-08-10 |
| 4987857 | Vacuum deposition apparatus with dust collector electrode | Kenichi Aketagawa | 1991-01-29 |
| 4599069 | Substrate holder for molecular beam epitaxy apparatus | Shunichi MURAKAMI, Tetsuo Ishida | 1986-07-08 |