Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5441012 | Thin film deposition method for wafer | Junro Sakai, Toru Tatsumi | 1995-08-15 |
| 5284521 | Vacuum film forming apparatus | Junro Sakai, Shun Murakami, Hiroyoshi Murota, Toru Tatsumi | 1994-02-08 |
| 5234862 | Thin film deposition method | Junro Sakai, Toru Tatsumi, Shun Murakami, Hiroyoshi Murota | 1993-08-10 |