| 6616816 |
Substrate processing device and method |
— |
2003-09-09 |
| 6610180 |
Substrate processing device and method |
Nobuyuki Takahashi |
2003-08-26 |
| 6486076 |
Thin film deposition apparatus |
— |
2002-11-26 |
| 6197118 |
Thin film deposition apparatus |
— |
2001-03-06 |
| 5897923 |
Plasma treatment device |
Takahiro Tamura |
1999-04-27 |
| 5441012 |
Thin film deposition method for wafer |
Ken-ichi Aketagawa, Toru Tatsumi |
1995-08-15 |
| 5284521 |
Vacuum film forming apparatus |
Ken-ichi Aketagawa, Shun Murakami, Hiroyoshi Murota, Toru Tatsumi |
1994-02-08 |
| 5234862 |
Thin film deposition method |
Ken-ichi Aketagawa, Toru Tatsumi, Shun Murakami, Hiroyoshi Murota |
1993-08-10 |
| 4987857 |
Vacuum deposition apparatus with dust collector electrode |
Kenichi Aketagawa |
1991-01-29 |
| 4599069 |
Substrate holder for molecular beam epitaxy apparatus |
Shunichi MURAKAMI, Tetsuo Ishida |
1986-07-08 |