Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5530616 | Electrostastic chuck | Tetsuo Kitabayashi, Atsushi Obara, Yasumi Sago, Masami Sasaki | 1996-06-25 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5530616 | Electrostastic chuck | Tetsuo Kitabayashi, Atsushi Obara, Yasumi Sago, Masami Sasaki | 1996-06-25 |