Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10844490 | Vapor phase film deposition apparatus | Noboru Suda, Takahiro Oishi, Shih-Yung Shieh, Tsan-Hua Huang | 2020-11-24 |
| 10208378 | Chemical vapor deposition apparatus | Noboru Suda, Takahiro Oishi, Tsan-Hua Huang, Shih-Yung Shieh | 2019-02-19 |
| 6837940 | Film-forming device with a substrate rotating mechanism | Kazushige Shiina | 2005-01-04 |
| 4906583 | Making a semiconductor photodetector | Shuzo Kagawa | 1990-03-06 |
| 4883020 | Apparatus of metal organic chemical vapor deposition for growing epitaxial layer of compound semiconductor | Kazumi Kasai, Hiromi Itoh, Hitoshi Tanaka, Tatsuya Oh-hori | 1989-11-28 |
| 4411729 | Method for a vapor phase growth of a compound semiconductor | — | 1983-10-25 |