Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10844490 | Vapor phase film deposition apparatus | Noboru Suda, Junji Komeno, Takahiro Oishi, Tsan-Hua Huang | 2020-11-24 |
| 10801110 | Gas injector for semiconductor processes and film deposition apparatus | — | 2020-10-13 |
| 10208378 | Chemical vapor deposition apparatus | Junji Komeno, Noboru Suda, Takahiro Oishi, Tsan-Hua Huang | 2019-02-19 |