Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8342907 | Polishing state monitoring method | Yoichi Kobayashi, Shunsuke Nakai, Hitoshi Tsuji, Yasuo Tsukuda, Kazunari Shinya | 2013-01-01 |
| 7645181 | Polishing state monitoring apparatus and polishing apparatus | Yoichi Kobayashi, Shunsuke Nakai, Hitoshi Tsuji, Yasuo Tsukuda, Kazunari Shinya | 2010-01-12 |
| 7438627 | Polishing state monitoring method | Yoichi Kobayashi, Shunsuke Nakai, Hitoshi Tsuji, Yasuo Tsukuda, Kazunari Shinya | 2008-10-21 |
| 7252575 | Polishing state monitoring apparatus and polishing apparatus and method | Yoichi Kobayashi, Shunsuke Nakai, Hitoshi Tsuji, Yasuo Tsukuda, Kazunari Shinya | 2007-08-07 |
| 6999168 | Spectrophotometer | — | 2006-02-14 |