Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8342907 | Polishing state monitoring method | Yoichi Kobayashi, Shunsuke Nakai, Hitoshi Tsuji, Yasuo Tsukuda, Junki Ishimoto | 2013-01-01 |
| 7645181 | Polishing state monitoring apparatus and polishing apparatus | Yoichi Kobayashi, Shunsuke Nakai, Hitoshi Tsuji, Yasuo Tsukuda, Junki Ishimoto | 2010-01-12 |
| 7438627 | Polishing state monitoring method | Yoichi Kobayashi, Shunsuke Nakai, Hitoshi Tsuji, Yasuo Tsukuda, Junki Ishimoto | 2008-10-21 |
| 7252575 | Polishing state monitoring apparatus and polishing apparatus and method | Yoichi Kobayashi, Shunsuke Nakai, Hitoshi Tsuji, Yasuo Tsukuda, Junki Ishimoto | 2007-08-07 |
| 7012699 | Method of and apparatus for measuring thickness of thin film or thin layer | Takashi Nishimura | 2006-03-14 |
| 7002693 | Thickness measurement method and apparatus | — | 2006-02-21 |
| 5442574 | Method and apparatus for determining a base line of a measurement | — | 1995-08-15 |