Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8592765 | Thermopile infrared sensor by monolithic silicon micromachining | Bodo Forg, Frank Herrmann, Wilhelm Leneke, Marion Simon, Karlheinz Storck +1 more | 2013-11-26 |
| 7842922 | Thermopile infrared sensor array | Wilhelm Leneke, Marion Simon, Mischa Schulze, Karlheinz Storck | 2010-11-30 |
| 5597957 | Microvacuum sensor having an expanded sensitivity range | Friedemann Voelklein | 1997-01-28 |