| 11988561 |
Method for producing a thermal infrared sensor array in a vacuum-filled wafer-level housing |
Jörg Schieferdecker, Frank Herrmann, Christian Schmidt, Wilhelm Leneke, Marion Simon +1 more |
2024-05-21 |
| 11187589 |
High-resolution thermopile infrared sensor array |
Jörg Schieferdecker, Michael Schnorr, Karlheinz Storck, Wilhelm Leneke, Marion Simon |
2021-11-30 |
| 10948355 |
High resolution thermopile infrared sensor array having monolithically integrated signal processing |
Michael Schnorr, Jörg Schieferdecker, Karlheinz Storck, Marion Simon, Wilhelm Leneke |
2021-03-16 |
| 10788370 |
Thermal infrared sensor array in wafer-level package |
Frank Herrmann, Christian Schmidt, Jörg Schieferdecker, Wilhelm Leneke, Marion Simon +1 more |
2020-09-29 |
| 10739201 |
High-resolution thermopile infrared sensor array |
Jörg Schieferdecker, Michael Schnorr, Karlheinz Storck, Wilhelm Leneke, Marion Simon |
2020-08-11 |
| 10578493 |
High resolution thermopile infrared sensor array having monolithically integrated signal processing |
Michael Schnorr, Jörg Schieferdecker, Karlheinz Storck, Marion Simon, Wilhelm Leneke |
2020-03-03 |
| 9945725 |
Thermopile infrared sensor structure with a high filling level |
Frank Herrmann, Marion Simon, Wilhelm Leneke, Karlheinz Storck, Michael Müller +1 more |
2018-04-17 |
| 8592765 |
Thermopile infrared sensor by monolithic silicon micromachining |
Frank Herrmann, Wilhelm Leneke, Joerg Schieferdecker, Marion Simon, Karlheinz Storck +1 more |
2013-11-26 |