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Method for producing a thermal infrared sensor array in a vacuum-filled wafer-level housing |
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| 11268861 |
SMD-enabled infrared thermopile sensor |
Jörg Schieferdecker, Frank Herrmann, Christian Schmidt, Wilhelm Leneke, Karlheinz Storck +1 more |
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High-resolution thermopile infrared sensor array |
Jörg Schieferdecker, Bodo Forg, Michael Schnorr, Karlheinz Storck, Wilhelm Leneke |
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| 10948355 |
High resolution thermopile infrared sensor array having monolithically integrated signal processing |
Bodo Forg, Michael Schnorr, Jörg Schieferdecker, Karlheinz Storck, Wilhelm Leneke |
2021-03-16 |
| 10794768 |
Thermopile infrared individual sensor for measuring temperature or detecting gas |
Mischa Schulze, Wilhelm Leneke, Karlheinz Storck, Frank Herrmann, Christian Schmidt +1 more |
2020-10-06 |
| 10788370 |
Thermal infrared sensor array in wafer-level package |
Frank Herrmann, Christian Schmidt, Jörg Schieferdecker, Wilhelm Leneke, Bodo Forg +1 more |
2020-09-29 |
| 10739201 |
High-resolution thermopile infrared sensor array |
Jörg Schieferdecker, Bodo Forg, Michael Schnorr, Karlheinz Storck, Wilhelm Leneke |
2020-08-11 |
| 10578493 |
High resolution thermopile infrared sensor array having monolithically integrated signal processing |
Bodo Forg, Michael Schnorr, Jörg Schieferdecker, Karlheinz Storck, Wilhelm Leneke |
2020-03-03 |
| 9945725 |
Thermopile infrared sensor structure with a high filling level |
Frank Herrmann, Wilhelm Leneke, Bodo Forg, Karlheinz Storck, Michael Müller +1 more |
2018-04-17 |
| 8592765 |
Thermopile infrared sensor by monolithic silicon micromachining |
Bodo Forg, Frank Herrmann, Wilhelm Leneke, Joerg Schieferdecker, Karlheinz Storck +1 more |
2013-11-26 |
| 7842922 |
Thermopile infrared sensor array |
Wilhelm Leneke, Mischa Schulze, Karlheinz Storck, Joerg Schieferdecker |
2010-11-30 |
| 6710348 |
Apparatus for sensing electromagnetic radiation |
Manfred Rothley, Roland Mueller-Fiedler, Erich Zabler, Lars Erdmann, Wilhelm Leneke +2 more |
2004-03-23 |
| 6294787 |
Sensor system and manufacturing process as well as self-testing process |
Jörg Schieferdecker, Karlheinz Storck, Manfred Rothley, Erich Zabler, Rolf Jähne |
2001-09-25 |
