Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10867825 | Wafer boat and treatment apparatus for wafers | Michael Klick, Ralf Rothe, Wilfried Lerch | 2020-12-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10867825 | Wafer boat and treatment apparatus for wafers | Michael Klick, Ralf Rothe, Wilfried Lerch | 2020-12-15 |