Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10867825 | Wafer boat and treatment apparatus for wafers | Ralf Rothe, Wilfried Lerch, Johannes Rehli | 2020-12-15 |
| 5861752 | Method and apparatus for determining of absolute plasma parameters | — | 1999-01-19 |
| 5705931 | Method for determining absolute plasma parameters | — | 1998-01-06 |