| 12202019 |
Method and system for the removal and/or avoidance of contamination in charged particle beam systems |
Marc Smits, Chris Franciscus Jessica Lodewijk, Hindrik Willem Mook, Ludovic Lattard |
2025-01-21 |
| 11738376 |
Method and system for the removal and/or avoidance of contamination in charged particle beam systems |
Marc Smits, Chris Franciscus Jessica Lodewijk, Hindrik Willem Mook, Ludovic Lattard |
2023-08-29 |
| 10987705 |
Method and system for the removal and/or avoidance of contamination in charged particle beam systems |
Marc Smits, Chris Franciscus Jessica Lodewijk, Hindrik Willem Mook, Ludovic Lattard |
2021-04-27 |
| 10632509 |
Method and system for the removal and/or avoidance of contamination in charged particle beam systems |
Marc Smits, Chris Franciscus Jessica Lodewijk, Hindrik Willem Mook, Ludovic Lattard |
2020-04-28 |
| 9981293 |
Method and system for the removal and/or avoidance of contamination in charged particle beam systems |
Marc Smits, Chris Franciscus Jessica Lodewijk, Hindrik Willem Mook, Ludovic Lattard |
2018-05-29 |
| 9941093 |
Target processing unit |
David Johannes van den Bergen |
2018-04-10 |
| RE46452 |
Electrostatic lens structure |
Stijn Willem Herman Karel Steenbrink, Peter Veltman |
2017-06-27 |
| 9263234 |
Target processing unit |
David Johannes van den Bergen |
2016-02-16 |
| 9111657 |
Charged particle optical device |
Sohail Chatoor, Joost Witteveen, Alon Rosenthal |
2015-08-18 |
| 8987679 |
Enhanced integrity projection lens assembly |
Stijn Willem Herman Karel Steenbrink, Bart Schipper |
2015-03-24 |
| 8716671 |
Enhanced integrity projection lens assembly |
Stijn Willem Herman Karel Steenbrink, Bart Schipper |
2014-05-06 |
| 8624478 |
High voltage shielding arrangement of a charged particle lithography system |
Stijn Willem Herman Karel Steenbrink, Norman Hendrikus Rudolf Baars, Bart Schipper |
2014-01-07 |
| 8362441 |
Enhanced integrity projection lens assembly |
Stijn Willem Herman Karel Steenbrink, Bart Schipper |
2013-01-29 |
| 8198602 |
Electrostatic lens structure |
Stijn Willem Herman Karel Steenbrink, Peter Veltman |
2012-06-12 |