| 7800190 |
Getter on die in an upper sense plate designed system |
Bryan R. Seppala, Max C. Glenn |
2010-09-21 |
| 7736946 |
System and method for sealing a MEMS device |
Bryan R. Seppala, Harlan L. Curtis, Richard K. Spielberger |
2010-06-15 |
| 7491567 |
MEMS device packaging methods |
Harlan L. Curtis |
2009-02-17 |
| 7491581 |
Dicing technique for flip-chip USP wafers |
Harlan L. Curtis |
2009-02-17 |
| 7482193 |
Injection-molded package for MEMS inertial sensor |
Harlan L. Curtis |
2009-01-27 |
| 7370530 |
Package for MEMS devices |
Harlan L. Curtis |
2008-05-13 |
| 7314777 |
Chip packaging systems and methods |
Harlan L. Curtis, Lori Dunaway, Max C. Glenn |
2008-01-01 |
| 7297573 |
Methods and apparatus for particle reduction in MEMS devices |
Harlan L. Curtis, Lori Dunaway, Max C. Glenn |
2007-11-20 |
| 7074636 |
Methods and apparatus for attaching getters to MEMS device housings |
Harlan L. Curtis, Max C. Glenn, Lori Dunaway |
2006-07-11 |
| 7037805 |
Methods and apparatus for attaching a die to a substrate |
Harlan L. Curtis, Lori Dunaway, Max C. Glenn |
2006-05-02 |
| 6987304 |
Methods and apparatus for particle reduction in MEMS devices |
Harlan L. Curtis, Lori Dunaway, Max C. Glenn |
2006-01-17 |
| 6927098 |
Methods and apparatus for attaching MEMS devices to housing |
Harlan L. Curtis, Lori Dunaway, Max C. Glenn |
2005-08-09 |
| 6914323 |
Methods and apparatus for attaching getters to MEMS device housings |
Harlan L. Curtis, Max C. Glenn, Lori Dunaway |
2005-07-05 |