| 7202138 |
Spin coating for maximum fill characteristic yielding a planarized thin film surface |
John Whitman |
2007-04-10 |
| 7101771 |
Spin coating for maximum fill characteristic yielding a planarized thin film surface |
John Whitman |
2006-09-05 |
| 6946407 |
Method for pretreating a substrate prior to application of a polymeric coat |
Douglas S. Schramm, Lorna M. Mitson |
2005-09-20 |
| 6806209 |
Develop processing method of a resist surface on a substrate for reduced processing time and reduced defect density |
Greg Montanino |
2004-10-19 |
| 6784120 |
Method for pretreating a substrate prior to application of a polymeric coat |
Douglas S. Schramm, Lorna M. Mitson |
2004-08-31 |
| 6680078 |
Method for dispensing flowable substances on microelectronic substrates |
Greg Montanino |
2004-01-20 |
| 6559072 |
Develop processing method of a resist surface of a substrate for reduced processing time and reduced defect density |
Greg Montanino |
2003-05-06 |
| 6461983 |
Method for pretreating a substrate prior to application of a polymeric coat |
Douglas S. Schramm, Lorna M. Mitson |
2002-10-08 |
| 6221157 |
Spin coating bowl exhaust system |
Shawn D. Davis, John S. Molebash, Bruce L. Hayes |
2001-04-24 |
| 6162294 |
Spin coating bowl exhaust system |
Shawn D. Davis, John S. Molebash, Bruce L. Hayes |
2000-12-19 |
| 6132802 |
Methods for exhausting a wafer coating apparatus |
Shawn D. Davis, John S. Molebash, Bruce L. Hayes |
2000-10-17 |
