| 6322934 |
Method for making integrated circuits including features with a relatively small critical dimension |
Feng Jin |
2001-11-27 |
| 6248485 |
Method for controlling a process for patterning a feature in a photoresist |
— |
2001-06-19 |
| 6168904 |
Integrated circuit fabrication |
Chong-Cheng Fu |
2001-01-02 |
| 5780316 |
Linewidth control apparatus and method |
Hongzong Chew, Hamlet Herring, John Louis Ryan, Robert Ching-I Sun, Thomas Wolf +1 more |
1998-07-14 |
| 5264076 |
"Integrated circuit process using a ""hard mask""" |
David P. Favreau |
1993-11-23 |
| 4788117 |
Semiconductor device fabrication including a non-destructive method for examining lithographically defined features |
Dennis Earl Schrope, Tungsheng Yang |
1988-11-29 |
| 4510176 |
Removal of coating from periphery of a semiconductor wafer |
Nicholas A. Soos |
1985-04-09 |
| 4240195 |
Dynamic random access memory |
James T. Clemens, Frank J. Procyk, George M. Trout |
1980-12-23 |