Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7432517 | Pulse modifier, lithographic apparatus, and device manufacturing method | Hako Botma, Mark Trentelman, Adel Joobeur | 2008-10-07 |
| 7230678 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | — | 2007-06-12 |