Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8019046 | Apparatus for generating shortwave radiation | Rupert C. C. Perera | 2011-09-13 |
| 6864490 | Reflectometer device | Rupert C. C. Perera, Phillip J. Batson | 2005-03-08 |
| 6738135 | System for inspecting EUV lithography masks | Rupert C. C. Perera, Patrick P. Naulleau | 2004-05-18 |
| 4776696 | Optical system for high resolution spectrometer/monochromator | Michael C. Hettrick | 1988-10-11 |