Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9507272 | Apparatus and method of controlling chuck, and exposure apparatus and control method thereof | Sang Don Jang, Tae Kyu Son | 2016-11-29 |
| 9287155 | Apparatus and method of controlling chuck, and exposure apparatus and control method thereof | Sang Don Jang, Tae Kyu Son | 2016-03-15 |
| 9069336 | Ultra-precision position control device and method for determining position and attitude information associated with a 6-degree-of-freedom stage thereof | Sang Don Jang, Tae Kyu Son | 2015-06-30 |