Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7836901 | Method and apparatus for wafer cleaning | Steven Verhaverbeke, Alexander Sou-Kang Ko, Rick Endo | 2010-11-23 |
| 7819985 | Method and apparatus for wafer cleaning | Steven Verhaverbeke, Alexander Sou-Kang Ko, Rick Endo | 2010-10-26 |
| 7451774 | Method and apparatus for wafer cleaning | Steven Verhaverbeke, Alexander Sou-Kang Ko, Rick Endo | 2008-11-18 |
| 7449127 | Cleaning method and solution for cleaning a wafer in a single wafer process | Steven Verhaverbeke | 2008-11-11 |
| 7334588 | Method and apparatus for wafer cleaning | Steven Verhaverbeke, Alexander Sou-Kang Ko, Rick Endo | 2008-02-26 |
| 7205023 | Method and apparatus for chemical mixing in a single wafer process | Steven Verhaverbeke, Rick Endo, Alexander Sou-Kang Ko | 2007-04-17 |
| 7037842 | Method and apparatus for dissolving a gas into a liquid for single wet wafer processing | Steven Verhaverbeke | 2006-05-02 |
| 7021319 | Assisted rinsing in a single wafer cleaning process | Steven Verhaverbeke | 2006-04-04 |
| 6927176 | Cleaning method and solution for cleaning a wafer in a single wafer process | Steven Verhaverbeke | 2005-08-09 |
| 6524940 | Methods and devices utilizing the ammonium termination of silicon dioxide films | Steven Verhaverbeke | 2003-02-25 |