Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12276905 | Blank mask and photomask using the same | GeonGon LEE, Seong Yoon KIM, Suk Young CHOI, Hyung Joo Lee, Sung Hoon SON +1 more | 2025-04-15 |
| 10056229 | Charged-particle beam exposure method and charged-particle beam correction method | Sukjong Bae, Myoungsoo Lee | 2018-08-21 |
| 10007185 | Electron beam lithography method and apparatus | Sook Hyun Lee, Jin Choi, Sinjeung Park, Seombeom Kim | 2018-06-26 |
| 9766540 | Method of forming photomask | Jong-Keun Oh, Hyungho Ko, Jaehyuck Choi, JunYoul Choi | 2017-09-19 |
| 9709893 | Exposure method using electron beam and substrate manufacturing method using the same | Sook Hyun Lee, Shuichi Tamamushi, So-eun Shin, Jin Choi | 2017-07-18 |
| 9323142 | Methods of reducing registration errors of photomasks and photomasks formed using the methods | Jin Sun Karoline Choi, Sukjong Bae, Jeonghyeon Lee | 2016-04-26 |
| 9223199 | Photomask and method of forming the same | Jong-Keun Oh, Hyungho Ko, Jaehyuck Choi, JunYoul Choi | 2015-12-29 |