Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8980049 | Apparatus for supporting substrate and plasma etching apparatus having the same | Won Haeng LEE, Kwan Goo Rha, Jung Hee Lee, Chul Hee Jang, Dong-Wan Kim | 2015-03-17 |