Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8980049 | Apparatus for supporting substrate and plasma etching apparatus having the same | Kwan Goo Rha, Jung Hee Lee, Chul Hee Jang, Hyang Joo Lee, Dong-Wan Kim | 2015-03-17 |
| 5502014 | Non-magnetic ceramic substrate material | — | 1996-03-26 |