Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8980049 | Apparatus for supporting substrate and plasma etching apparatus having the same | Won Haeng LEE, Jung Hee Lee, Chul Hee Jang, Hyang Joo Lee, Dong-Wan Kim | 2015-03-17 |
| 8888950 | Apparatus for plasma processing and method for plasma processing | Kyung Ho Lee, Jae Ho Guahk, Jae Chul Choi, Young Ki Han, Hee Se Lee +4 more | 2014-11-18 |
| D664459 | Chip for biochemical assay | — | 2012-07-31 |
| D647412 | Biochemical analyzer | — | 2011-10-25 |
| 6435428 | Showerhead apparatus for radical-assisted deposition | Jae-Ho Kim, In Chel Shin, Sang-Joon Park, Sang-Ho Kim | 2002-08-20 |
| 6376893 | Trench isolation structure and fabrication method thereof | — | 2002-04-23 |
| 6291850 | Structure of cylindrical capacitor electrode with layer of hemispherical grain silicon | Byung Jae Choi, Hong-Seok Kim, Jae-Young An | 2001-09-18 |
| 6127241 | Trench isolation structure and fabrication method thereof | — | 2000-10-03 |