Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8888950 | Apparatus for plasma processing and method for plasma processing | Kyung Ho Lee, Jae Ho Guahk, Jae Chul Choi, Hee Se Lee, Yong Hwan Lim +4 more | 2014-11-18 |
| 8864936 | Apparatus and method for processing substrate | Young Soo Seo | 2014-10-21 |
| 8373086 | Plasma processing apparatus and method for plasma processing | Hyoung Won Kim, Young Soo Seo, Chi Kug Yoon, Jun Hyeok Lee, Jae Chul Choi | 2013-02-12 |
| 8105647 | Method of forming oxide film and oxide deposition apparatus | Jin Ho Lee, Jae Chan KWAK | 2012-01-31 |
| 6734100 | Method of forming ruthenium thin film using plasma enhanced process | Kyung-Woong Park, Jung-Hwan Choi | 2004-05-11 |