Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12381070 | Substrate treatment apparatus and semiconductor device manufacturing method using the same | Jihwan Kim, Nam-Kyun Kim, Hyun Bae Kim, Seungbo Shim, Kyung-Sun Kim +2 more | 2025-08-05 |
| 12020903 | Plasma etching method and semiconductor device fabrication method including the same | Yonghee Kim, Byunghun Han, Donghyeon Na, Dougyong Sung, Seungbo Shim +3 more | 2024-06-25 |
| 11545341 | Plasma etching method and semiconductor device fabrication method including the same | Yonghee Kim, Byunghun Han, Donghyeon Na, Dougyong Sung, Seungbo Shim +3 more | 2023-01-03 |