Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12417898 | Substrate processing apparatus | Seung Youb SA, Kwang Su Park, Chul Joo HWANG | 2025-09-16 |
| 10818534 | Substrate processing apparatus arranged in process chamber and operating method thereof | Ki Bum Kim, Seung Youb SA, Ram WOO, Myung-jin Lee, Seung Dae CHOI +1 more | 2020-10-27 |
| 10229849 | Substrate processing apparatus arranged in process chamber and operating method thereof | Ki Bum Kim, Seung Youb SA, Ram WOO, Myung-jin Lee, Seung Dae CHOI +1 more | 2019-03-12 |