Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11396082 | Substrate holding device and substrate processing apparatus including the same | — | 2022-07-26 |
| 11059137 | Tool set for use in position adjustment of positioning pins | — | 2021-07-13 |
| 9378997 | Substrate holding mechanism, substrate transporting device, and semiconductor manufacturing apparatus | — | 2016-06-28 |
| 9236285 | Movable range adjusting mechanism for workpiece conveying device | — | 2016-01-12 |
| 8550875 | Method of operating substrate processing apparatus and substrate processing apparatus | Hiroomi Torii, Hiroyuki Kaneko, Misao Date, Takashi Mitsuya, Takamasa Nakamura | 2013-10-08 |
| 8202139 | Method of operating substrate processing apparatus and substrate processing apparatus | Hiroomi Torii, Hiroyuki Kaneko, Misao Date, Takashi Mitsuya, Takamasa Nakamura | 2012-06-19 |