| 10697086 |
Method for manufacturing silicon carbide epitaxial substrate, method for manufacturing silicon carbide semiconductor device, and apparatus for manufacturing silicon carbide epitaxial substrate |
Keiji Wada, Hironori Itoh |
2020-06-30 |
| 10612160 |
Epitaxial wafer and method for manufacturing same |
Taro Nishiguchi, Jun Genba, Hironori Itoh, Tomoaki Hatayama |
2020-04-07 |
| 9957641 |
Epitaxial wafer and method for manufacturing same |
Taro Nishiguchi, Jun Genba, Hironori Itoh, Tomoaki Hatayama |
2018-05-01 |
| 9455464 |
Power generation apparatus |
Chihiro Hiraiwa, Masatoshi Majima, Tetsuya Kuwabara, Tomoyuki Awazu, Naho Mizuhara +2 more |
2016-09-27 |
| 9325024 |
Gas decomposition component, method for producing gas decomposition component, and power generation apparatus |
Chihiro Hiraiwa, Masatoshi Majima, Tetsuya Kuwabara, Tomoyuki Awazu, Naho Mizuhara +2 more |
2016-04-26 |
| 9132384 |
Gas decomposition component, power generation apparatus, and method for decomposing gas |
Chihiro Hiraiwa, Masatoshi Majima, Tetsuya Kuwabara, Tomoyuki Awazu, Naho Mizuhara +2 more |
2015-09-15 |
| 9057147 |
Silicon carbide epitaxial substrate and method of manufacturing silicon carbide epitaxial substrate |
Jun Genba, Taro Nishiguchi, Akira Matsushima |
2015-06-16 |
| 7852896 |
Vertical cavity surface emitting laser |
Yutaka Onishi |
2010-12-14 |
| 6103359 |
Process and apparatus for manufacturing an anisotropic conductor sheet and a magnetic mold piece for the same |
— |
2000-08-15 |
| 6001744 |
Method of cleaning a surface of a compound semiconductor crystal of group II-VI elements of periodic table |
— |
1999-12-14 |