Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8660681 | Method and system for excursion monitoring in optical lithography processes in micro device fabrication | Andre Poock, Daniel Zschaebitz | 2014-02-25 |
HS
Heike Scholtz
Overall (All Time): #3,093,564 of 4,157,543Top 75%
1
Patents All Time