Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8880591 | Workflow management in distributed systems | Michael Feldman, Alexander Fiksel, Robert Steven Barnett, Jeremy Wallace Johnson, Vladimir Vialov | 2014-11-04 |
| 5914050 | Purged lower liner | Paul B. Comita, David K. Carlson, Kimberly E. Klinck | 1999-06-22 |
| 5809211 | Ramping susceptor-wafer temperature using a single temperature input | Roger N. Anderson | 1998-09-15 |
| 5793022 | Adaptive temperture controller and method of operation | Kimberly E. Klinck, Brian Cooper | 1998-08-11 |