Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8361549 | Power loading substrates to reduce particle contamination | Dong-Kil Yim, John M. White, Soo Young Choi, Jin Man Ha, Beom Soo Park | 2013-01-29 |
| 8075952 | Power loading substrates to reduce particle contamination | Dong-Kil Yim, John M. White, Soo Young Choi, Jin Man Ha, Beom Soo Park | 2011-12-13 |
| 7589031 | Method of avoiding haze formation on surfaces of silicon-containing PECVD-deposited thin films | Suhail Anwar, Chung-Hee Park, Beom Soo Park, Soo Young Choi, John M. White | 2009-09-15 |