HH

Hari Hegde

VI Veeco Instruments: 4 patents #49 of 323Top 20%
Overall (All Time): #1,008,398 of 4,157,543Top 25%
5
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
8703001 Grid assemblies for use in ion beam etching systems and methods of utilizing the grid assemblies 2014-04-22
7183716 Charged particle source and operation thereof Viktor Kanarov, Alan V. Hayes, Rustam Yevtukhov, Ira Reiss, Roger P. Fremgen +5 more 2007-02-27
6545580 Electromagnetic field generator and method of operation Mihai S. Risca, Alan V. Hayes, Abraham J. Navy, Roger P. Fremgen 2003-04-08
6447839 Method of depositing multilayer thin films Adrian Devasahayam, Jinsong Wang 2002-09-10
6139906 Methods of depositing multilayer thin films Adrian Devasahayam, Jinsong Wang 2000-10-31