Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6916397 | Methods and apparatus for maintaining a pressure within an environmentally controlled chamber | Kenneth Pfeiffer | 2005-07-12 |
| 6145673 | Wafer transfer cassette | Brian H. Burrows, Joseph A. Kraus | 2000-11-14 |