| 10037398 |
Pattern decomposition method for wiring patterns with chemoepitaxy based directed self assembly |
Markus Brink, Joy Cheng, Michael A. Guillorn, Kafai Lai, HsinYu Tsai |
2018-07-31 |
| 9738765 |
Hybrid topographical and chemical pre-patterns for directed self-assembly of block copolymers |
Markus Brink, Joy Cheng, Alexander Friz, Michael A. Guillorn, Chi-Chun Liu +4 more |
2017-08-22 |
| 9691615 |
Chemoepitaxy-based directed self assembly process with tone inversion for unidirectional wiring |
Markus Brink, Joy Cheng, Michael A. Guillorn, HsinYu Tsai |
2017-06-27 |
| 9514263 |
Chemo epitaxy mask generation |
Joy Cheng, Michael A. Guillorn, Kafai Lai, HsinYu Tsai |
2016-12-06 |
| 9107291 |
Formation of a composite pattern including a periodic pattern self-aligned to a prepattern |
Joy Cheng, Charles Thomas Rettner, Daniel P. Sanders |
2015-08-11 |
