Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11984344 | Lift apparatus and substrate processing apparatus including the same | Byeongsang Kim, Keonwoo KIM, Wooram Kim, Eungsu Kim, Heewon Min +4 more | 2024-05-14 |
| 11581202 | Substrate debonding apparatus | Ilyoung Han, Kyoungran Kim, Chulhyun Park, Minjae Shin, Hyunjin Lee +2 more | 2023-02-14 |
| 9553069 | Bonding apparatus and substrate manufacturing equipment including the same | Ilyoung Han, Kyoungran Kim, Donggil Shim, Youngjoo Lee, Junho Lee +1 more | 2017-01-24 |