Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6554980 | Vacuum treatment apparatus for deposition of thin layers on three-dimensional substrates | Ulrich Patz | 2003-04-29 |
| 6123494 | Process for the loading and unloading of an evacuatable treatment chamber and handling device for carrying out the process | Jurgen Henrich | 2000-09-26 |