Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6159333 | Substrate processing system configurable for deposition or cleaning | Anand Gupta, Srihari Ponnekanti, Laxman Murugesh | 2000-12-12 |
| 5810937 | Using ceramic wafer to protect susceptor during cleaning of a processing chamber | Anand Gupta, Srihari Ponnekanti, Laxman Murugesh | 1998-09-22 |