Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4984902 | Apparatus and method for compensating for errors in temperature measurement of semiconductor wafers during rapid thermal processing | John L. Crowley, Ahmad Kermani, Stephan Lassig, Noel H. Johnson | 1991-01-15 |
| 4969748 | Apparatus and method for compensating for errors in temperature measurement of semiconductor wafers during rapid thermal processing | John L. Crowley, Ahmad Kermani, Stephan Lassig, Noel H. Johnson | 1990-11-13 |