| 11834753 |
Reactor for epitaxial deposition with a heating inductor with movable turns |
Vincenzo Ogliari, Silvio Preti |
2023-12-05 |
| 11377754 |
Epitaxial deposition reactor with reflector external to the reaction chamber and cooling method of a susceptor and substrates |
Silvio Preti, Vincenzo Ogliari |
2022-07-05 |
| 10697087 |
Susceptor with supporting element |
Francesco Corea, Danilo Crippa, Laura Gobbo, Marco Mauceri, Vincenzo Ogliari +2 more |
2020-06-30 |
| 10392723 |
Reaction chamber for epitaxial growth with a loading/unloading device and reactor |
Francesco Corea, Danilo Crippa, Laura Gobbo, Marco Mauceri, Vincenzo Ogliari +2 more |
2019-08-27 |
| 10211085 |
Tool for manipulating substrates, manipulation method and epitaxial reactor |
Vincenzo Ogliari, Francesco Corea |
2019-02-19 |
| 9382642 |
Reaction chamber of an epitaxial reactor and reactor that uses said chamber |
Srinivas Yarlagadda, Natale Speciale, Mario Preti |
2016-07-05 |
| 7615121 |
Susceptor system |
Giacomo Maccalli, Gianluca Valente, Olle Kordina, Danilo Crippa |
2009-11-10 |
| 7488922 |
Susceptor system |
Giacomo Maccalli, Olle Kordina, Gianluca Valente, Danilo Crippa |
2009-02-10 |
| 7387687 |
Support system for a treatment apparatus |
Natale Speciale, Gianluca Valente, Danilo Crippa |
2008-06-17 |
| 7314526 |
Reaction chamber for an epitaxial reactor |
Vincenzo Ogliari, Giuseppe Tarenzi |
2008-01-01 |
| 7153368 |
Susceptor with epitaxial growth control devices and epitaxial reactor using the same |
Srinivas Yarlagadda |
2006-12-26 |
| 6991420 |
Tool for handling wafers and epitaxial growth station |
Vincenzo Ogliari |
2006-01-31 |
| 6648974 |
Device and method for handling substrates by means of a self-leveling vacuum system in epitaxial induction |
Vincenzo Ogliari, Vittorio Pozzetti |
2003-11-18 |
| 6579361 |
Chemical vapor deposition epitaxial reactor having two reaction chambers alternatively actuated and actuating method thereof |
— |
2003-06-17 |
| 4858557 |
Epitaxial reactors |
Vittorio Pozzetti, Piergiovanni Poggi |
1989-08-22 |